May 2006Princeton InstrumentsRequest Info
Princeton Instruments/Acton has unveiled the ExciLife-193 optical coatings for OEM applications. At a 45° incidence angle, the coatings provide >97% reflectance at 193 nm. The design was tested with an argon-fluoride 193-nm excimer laser at 300 mJ/cm2, 100 and 200 Hz, for 2 million laser pulses, without damage or change in reflectivity. To simulate immersion lithography applications, the coatings were placed in deionized water for one week and laser-tested at >500 mJ/cm2, 100 Hz, for 100,000 pulses, without damage. The company says that the coatings pass military-specification adhesion, abrasion and humidity tests. They have applications in materials processing, industrial marking, and lasik and wafer exposure systems.