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THIN-FILM DEPOSITION

Photonics Spectra
Jun 2006
INFICONRequest Info
 
Inficon_xtc3m_left.jpgAvailable in two models, the XTC/3 thin-film deposition controller from Inficon incorporates the ModeLock oscillator technology, which prevents film thickness errors caused by mode-hopping. The XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, two sensors and two sources, while the XTC/3S single-layer type supports up to nine films, two sensors and two sources. Operable with or without a computer, the device supports the company’s Crystal 12, CrystalSix and dual-sensor automatic crystal switching for continuous monitoring. It features thin-film transistor LCD graphic displays, and it enables operators to assign descriptive names for retrieval of films and processes.


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