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METROLOGY SYSTEMS

Photonics Spectra
Aug 2006
Rudolph Technologies Inc.Request Info
 
Metrology systems for measuring thin transparent films have been introduced by Rudolph Technologies Inc. The S3000 (300 mm) and S2000 (200 mm) use proprietary fifth-generation Focus beam ellipsometry technology that incorporates long-life laser light sources for high accuracy, long-term stability, a small spot size and easy tool-to-tool matching. Built on a proprietary Vanguard platform, the systems include a Microsoft Windows XP-based interface. They offer optional deep-UV and visible reflectometry capabilities.


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