The automated Wyko NT3300 optical profiler has been launched by Veeco Instruments Inc. Its dynamic microelectromechanical systems (MEMS) measurement option nondestructively measures MEMS devices as they actuate. The system uses a proprietary stroboscopic illuminator and synchronization electronics to capture 3-D data and to generate a video of the sample device as it cycles through its range of motion. Wyko Vision software locates features of interest and performs 3-D analyses such as determining resonant frequency and shape/distortion, and characterizing deflection. The system measures features 0.1 nm to 2 mm high with angstrom resolution, and has a programmable X-Y stage and software for fast measurement of large surface areas. Built-in tip/tilt eliminates the need to reposition the probe for successive scans.