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MASK ALIGNMENT

Photonics Spectra
Sep 2006
EV Group (EVG)Request Info
 
EV Group has developed an LED light source for mask-alignment systems, eliminating the environmental, health and safety risks involved with the use of mercury arc lamps and offering reduced cost of ownership. Compared with UV light sources, the LED technology enables low-power operation and eliminates the need for nitrogen cooling. It also offers a maintenance-free lifetime of more than 10 years. The light source is available for all of the company’s mask-alignment systems.


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