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HYBRID STAGE

Photonics Spectra
Sep 2006
Newport CorporationRequest Info
 
Newport_HybrYX.jpgNewport Corp. has added a single-plane X-Y hybrid stage to its DynamYX line of air-bearing systems. Suitable for such semiconductor applications as front-end wafer inspection and lithography, the HybrYX stage features better than 0.1% velocity ripple, low following error, Z-jitter and dynamic straightness of less than ±25 nm, minimum step-and-settle times, X-Y travel ranges of >1 m, and reliable and long-life operation. The device has a 765 × 1200-mm footprint and also is available with the company’s ZT3 (Z-tip-tilt-theta) stage and with its integrated vibration isolation with reaction force compensation system.


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