The 300-mm Axiospect 300 from Carl Zeiss Inc. is designed for the inspection and defect analysis of 0.13-µm and higher geometries. Its new optical system offers deep-UV imaging as a basic capability. The Axiospect has a 20-in., high-resolution flat screen for image viewing. Advanced software based on Windows NT provides digital image processing and management with GEM/SECS-II compliance, and defect review file support of KLA, Tencor, Inspex and Orbot formats. Imaging in UV can be done in standard bright field at 365 and 248 nm, and in laser confocal scanning at 365 nm.