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Z-Theta Motorized Rotary Stage

Photonics.com
Dec 2006
IPG Photonics, Microsystems Div.Request Info
 
HOLLIS, N.H., Dec. 6, 2006 -- A new integrated Z-Theta motorized stage from ultraviolet laser maker J P Sercel Associates (JPSA) offers high precision operation for wafer processing and positioning, according to the JPSA-ZTheta.jpgcompany.

Its non-contact operation -- as opposed to typical worm and wheel rotary designs -- reduces maintenance requirements, is less susceptible to wear and is not affected by torque variations because there's no gear interface.

The new Z-Theta stage provides 360° of rotational capability, and its Z-axis capability makes it applicable to a wide range of applications, with the ability to accommodate wafers of varying thicknesses and diameters.

Advantages of the new rotary stage include:
  • Continuous or limited travel
  • Excellent accuracy and repeatability
  • A cog-free motor for smooth motion
  • Zero gear backlash
  • Low wobble and bearing run-out
  • No accuracy changes over time due to gear wear
The stage is ideal for laser micromachining applications and wafer processing, among other applications, the company said. Resolution (microns/arc seconds) is 0.25 µm in the Z-axis and 0.72 arc seconds in the Theta axis; Repeatability of ±2 µm in the Z-axis, and ±1 arc second for Theta.

JPSA operates a high-performance ultraviolet laser job shop as well as a systems engineering and manufacturing business. For more information, visit: www.jpsalaser.com; e-mail: webinfo248@jpsalaser.com

J P Sercel Associates (JPSA) 
17D Clinton Dr.
Hollis, NH 03049
Phone: (603) 595-7048
Fax: (603) 598-3835



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GLOSSARY
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
wafer
A cross-sectional slice cut from an ingot of either single-crystal, fused, polycrystalline or amorphous material that has refined surfaces either lapped or polished. Wafers are used either as substrates for electronic device manufacturing or as optics. Typically, they are made of silicon, quartz, gallium arsenide or indium phosphide.
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