Z-Theta Motorized Rotary Stage
Dec 2006IPG Photonics, Microsystems Div.Request Info
HOLLIS, N.H., Dec. 6, 2006 -- A new integrated Z-Theta motorized stage from ultraviolet laser maker J P Sercel Associates (JPSA) offers high precision operation for wafer processing and positioning, according to the company.
Its non-contact operation -- as opposed to typical worm and wheel rotary designs -- reduces maintenance requirements, is less susceptible to wear and is not affected by torque variations because there's no gear interface.
The new Z-Theta stage provides 360° of rotational capability, and its Z-axis capability makes it applicable to a wide range of applications, with the ability to accommodate wafers of varying thicknesses and diameters.
Advantages of the new rotary stage include:
The stage is ideal for laser micromachining applications and wafer processing, among other applications, the company said. Resolution (microns/arc seconds) is 0.25 µm in the Z-axis and 0.72 arc seconds in the Theta axis; Repeatability of ±2 µm in the Z-axis, and ±1 arc second for Theta.
- Continuous or limited travel
- Excellent accuracy and repeatability
- A cog-free motor for smooth motion
- Zero gear backlash
- Low wobble and bearing run-out
- No accuracy changes over time due to gear wear
JPSA operates a high-performance ultraviolet laser job shop as well as a systems engineering and manufacturing business. For more information, visit: www.jpsalaser.com; e-mail: firstname.lastname@example.org
J P Sercel Associates (JPSA)
17D Clinton Dr.
Hollis, NH 03049
Phone: (603) 595-7048
Fax: (603) 598-3835