A UV-VIS-NIR range microscope and imaging system for microanalysis has been introduced by Craic Technologies. Capable of transmittance, reflectance, polarization and fluorescence, the UVM-1 operates in the spectral range of 200 to 2500 nm, imaging either narrow bands or across a wide spectral range. Offering submicron resolution, it operates nondestructively and with little sample preparation. It provides several magnifications, using the various objectives offered, and can be fitted with the high-resolution digital imaging system or with eyepieces for direct visualization. In the deep-UV region, the instrument is used for subsurface inspection of semiconductors and the inspection of flat panel displays. In the near-IR, applications include high-resolution imaging through silicon, GaAs and other normally opaque materials.