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Wafer Handler Modules

Photonics.com
Mar 2007
McBain SystemsRequest Info
 
CHATSWORTH, Calif., March 20, 2007 -- McBain Instruments, a supplier of microscopes and microscopy systems to the industrial, biomedical and research and development markets, announces a newly designed lab tool, the Wafer Handler WL150 and WL200 series modules.

The innovative semiautomatic wafer inspection device offers high throughput at 750 WPH with smooth, reliable and safe handling of wafers up to 200 mm. The new, portable apparatus is an updated and upgraded system that replaces the "Ultrastation" wafer handling system, no longer available from Irvine Optical, the company said.

WaferHandler.jpgEconomical and compact, McBain Instruments' new wafer cassettes accommodate either 3 to 6 in. (WL150) or 5 to 8 in. (WL200) wafer sizes. The Class 1-cleanroom-compatible Wafer Handler also features "smart" stepper motors for the drive axis, motors that provide stall and fault detection, linear stages for smooth and repeatable action and vacuum-touch end effectors with sensing capabilities. The easy-to-mount device facilitates safer wafer handling with user-defined inspection positions and a strategic spring-loaded counterbalance to support the majority of the load without overloading the Z-axis mechanism.

The standard VESA interface makes integration seamless with virtually all major microscopes, optics and inspection devices,the company said. The complete system is provided with an intuitive HMI (human-machine interface) control box and numeric keypad. Ideal for labs and automated work station tasks that require reliable and safe wafer handling and loading, it is in full production and shipping now. McBain's Wafer Handler modules are available with a 12-month parts and labor warranty.

McBain is the exclusive southwestern regional industrial dealer for Leica Microsystems and a distributor of Yokogawa's line of real-time confocal systems. For more information, visit: www.mcbaininstruments.com; e-mail: sales@mcbinst.com

McBain Instruments
9601 Variel Ave.
Chatsworth, CA 91311
Phone: (818) 998-2702
Fax: (818) 718-0363



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GLOSSARY
microscope
An instrument consisting essentially of a tube 160 mm long, with an objective lens at the distant end and an eyepiece at the near end. The objective forms a real aerial image of the object in the focal plane of the eyepiece where it is observed by the eye. The overall magnifying power is equal to the linear magnification of the objective multiplied by the magnifying power of the eyepiece. The eyepiece can be replaced by a film to photograph the primary image, or a positive or negative relay...
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
stepper motor
A positioning drive that rotates a fraction of a 360° turn when the motor coils are activated, resulting in linear or rotary motion. They are generally one of two types, either variable reluctance or permanent magnet; the characteristics are much the same. Also called stepping motors.
wafer
A cross-sectional slice cut from an ingot of either single-crystal, fused, polycrystalline or amorphous material that has refined surfaces either lapped or polished. Wafers are used either as substrates for electronic device manufacturing or as optics. Typically, they are made of silicon, quartz, gallium arsenide or indium phosphide.
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