Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
SPECIAL ANNOUNCEMENT
2016 Photonics Buyers' Guide Clearance! – Use Coupon Code FC16 to save 60%!
share
Email Facebook Twitter Google+ LinkedIn

LEM Interferometer

Photonics.com
Apr 2007
HORIBA ScientificRequest Info
 
Horiba Jobin Yvon announces the release of its new LEM interferometer for in-situ etch rate monitoring and end-point detection.

The LEM replaces the Sofie DigiLem. With its new compact design and enhanced image quality, the LEM can be mounted on any process chamber with a direct top view of the wafer. It provides a real-time digital CCD image of the sample surface, making its 30-m laser beam positioning simple and accurate. Based on interferometry technique, the LEM provide in-situ etch/growth rate monitoring for endpoint detection of a wide range of dry etch applications.

Depending on the configuration selected, the LEM can provide a simple analog signal output for analysis with an external software, or can be delivered with our state-of-the-art APC software --Sigma-P -- for accurate etch rate, trench depth and process statistical calculations. By using simply a TTL trigger and our optional pattern recognition software, the LEM can be easily interfaced to any process chamber for an operator-free process monitoring and end-point detection.


REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required
GLOSSARY
interferometer
An instrument that employs the interference of lightwaves to measure the accuracy of optical surfaces; it can measure a length in terms of the length of a wave of light by using interference phenomena based on the wave characteristics of light. Interferometers are used extensively for testing optical elements during manufacture. Typical designs include the Michelson, Twyman-Green and Fizeau interferometers. The basic interferometer components are a light source, a beamsplitter, a reference...
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
wafer
A cross-sectional slice cut from an ingot of either single-crystal, fused, polycrystalline or amorphous material that has refined surfaces either lapped or polished. Wafers are used either as substrates for electronic device manufacturing or as optics. Typically, they are made of silicon, quartz, gallium arsenide or indium phosphide.
Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2016 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.