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DSM200 MEMS Metrology System
May 2007
SUSS MicroTec AGRequest Info
GARCHING, Germany, May 3, 2007 -- With the DSM200, microelectronics and test systems maker Suss MicroTec AG said it has developed an automated metrology system for all emerging front-to-back alignment applications.

SussMicrotecDsm200.jpgAccording to the company, the cassette-cassette, front-to-back alignment metrology system is the ideal tool for verifying alignment accuracy on wafers from 2 in. to 200 mm. Incorporating state-of-the-art pattern recognition technology, the DSM200 offers the highest measurement accuracy of 0.2 µm at 3 σ on a fully automated platform with minimized operator intervention.

Based on the latest production platform of the Suss MA200 compact mask aligner, the DSM200 provides reliable and accurate metrology for double-sided alignment and exposure applications frequently used in the manufacturing of MEMS (microelectromechanical systems) devices, power semiconductors and optoelectronics.

"We believe the DSM200 offers a value-engineered measurement solution exceeding the metrology requirements for the majority of double-sided aligned and exposed production applications," said Rolf Wolf, managing director of Suss MicroTec’s lithography division.

For more information, visit:

Suss MicroTec AG
Schleissheimer Str. 90
D 85748 Garching
Phone: +49 89 32007 0
Fax: +49 89 32007 162


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The science of measurement, particularly of lengths and angles.
A sub-field of photonics that pertains to an electronic device that responds to optical power, emits or modifies optical radiation, or utilizes optical radiation for its internal operation. Any device that functions as an electrical-to-optical or optical-to-electrical transducer. Electro-optic often is used erroneously as a synonym.
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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