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Metrology for Complex 3-D Objects

Photonics.com
May 2007
ASE Optics LLCRequest Info
 
Ase Optics Inc. has developed a unique non-contact scanning metrology instrument capable of measuring the surface profile and optical thickness of 3-D objects at a spatial resolution of 25 µm and a measurement accuracy of 100 nm.

The instrument features a commercial Lumetrics OptiGauge that utilizes low coherence dual-wavelength interferometry technology originally invented at Eastman Kodak Co. to simultaneously measure the optical thickness of all layers within multilayer materials.


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GLOSSARY
interferometry
The study and utilization of interference phenomena, based on the wave properties of light.
metrology
The science of measurement, particularly of lengths and angles.
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
scanning
The successive analysis or synthesizing of the light values or other similar characteristics of the components of a picture area, following a given method.
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