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  • Pulse-Energy Sensors
Jul 2007
Coherent Inc.Request Info
SANTA CLARA, Calif., July 2, 2007 -- New pulse-energy sensors from Coherent Inc. are optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm.

The EnergyMax series sensors feature high accuracy and a large active area and use a novel coating that delivers superior long-term damage resistance. They can perform pulse-energy measurements from 50 to 250 mJ, operate at repetition rates from single shot to 400 Hz and are compatible with Coherent 3sigma, FieldMaxII-TOP, FieldMaxII-P, EPM1000 and EPM2000 meters, Coherent said. 

The excimer laser EnergyMax series comprises four individual products. These are 25-and 50-mm-diameter sensors calibrated at either 193 or 248 nm. Onboard sensors provide automatic temperature compensation, and built-in spectral compensation enables quantitative operation at other wavelengths.

Both sensors accept an optional heat sink, which can be attached by the user to extend the maximum energy or average power range. These heat sinks allow a 25-mm excimer laser sensor to be used up to 18-W average power, and 50-mm sensors to be used up to 43-W average power (both at 193 nm).

For more information, visit:; e-mail:

Coherent Inc.
5100 Patrick Henry Dr.
Santa Clara, CA 95054
Phone: (408) 764-4000
Fax: (408) 764-4800


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A contraction of "excited dimer." The term refers to an excited species made by combination of two identical atoms or molecules, one of which is excited and one of which is at a ground state.
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
1. A generic term for detector. 2. A complete optical/mechanical/electronic system that contains some form of radiation detector.
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