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WAFER INSPECTION

Photonics Spectra
Dec 1998
Carl Zeiss Microscopy LLCRequest Info
 
The Axiosprint from Carl Zeiss Inc. is a two-cassette front-loading wafer inspection system with front- and backside macroinspection units and a motorized microinspection stage. It is equipped with the Axiotron 2 microscope and inspection software, and is designed with consideration for SEMI standards such as cassette placement and correct load port height. In macro inspection mode, the wafer can be tilted up to 30° using joystick control; in backside inspection, a flipper arm turns the wafer and shows the rear side.


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