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  • Xantos XS Excimer Laser
Sep 2007
Coherent Inc.Request Info
SANTA CLARA, Calif., Sept. 10, 2007 -- Coherent Inc. said its new Xantos XS features an integrated gas compartment, a unique feature in the excimer laser market that makes laser operation as flexible as possible. 

The internal gas compartment of this self-contained excimer laser consists of a pre-mixed laser gas bottle and all necessary gas supply equipment for laser operation. This design enables automated gas refilling without external gas and vacuum lines, and meets all international gas handling and safety standards, Coherent said.

XantosXS.jpgIn addition, the Xantos XS operates from a single-phase power source and requires no water cooling, making it a "plug and play" laser that can be easily installed and/or simply moved to a new location without the need for a specialized support infrastructure, the company said.

The laser is available at all fluoride wavelengths -- 157 nm, 193 nm, 248 nm, and 351 nm -- and delivers moderate pulse energies at repetition rates up to 500 Hz. These characteristics make the Xantos XS ideal for both scientific and precision industrial applications.

Based on the ExciStar XS, this self-contained laser also features long tube lifetime, high reliability, and long gas lifetimes, which result from its Almeta all metal-ceramic tube technology, Coherent said. These features make for a very low cost of ownership, in addition to greater flexibility and improved ease of use.

With a beam cross-section of 6 x 3 mm and excellent beam uniformity, the laser output can be easily used in a wide range of scientific and industrial applications, Coherent said. 

For more information, visit:; e-mail:

Coherent Inc.
5100 Patrick Henry Dr.
Santa Clara, CA 95054
Phone: (408) 764-4000
Fax: (408) 764-4800


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excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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