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PROBE STATION

Photonics Spectra
Oct 2007
Micromanipulator Co. Inc.Request Info
 
Micromanipulator_pbr5-R4.gifDesigned for low-current, submicron positioning applications, the P300J probe station released by The Micromanipulator Co. Inc. features single- point ground, dry/dark environment and integrated thermal chuck plumbing. It has motorized drives for interactive manual control of the probe station stage, Theta, platen and microscope, and is controlled by a joystick or by the company’s MicroTouch controls. A dynamic high-/low-speed range provides high resolution, precise positioning and quick scans across a 300-mm wafer. The RMC-7 motorized control systemdrives the probe station and features an X-Y-Theta mode for wafer alignment, a Z-lockout setting and a full X-Y-Z-Theta lockout mode.


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