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EXCIMER LASER

Photonics Spectra
Dec 2007
Coherent Inc.Request Info
 
Coherent_Xantos-XS-Excimer-.jpgXantos XS, manufactured by Coherent Inc., is a self-contained excimer laser with an internal gas compartment consisting of a premixed laser gas bottle and all necessary gas supply equipment for laser operation. Gas can be refilled automatically without external lines. The plug-and-play device operates from a single-phase power source and requires no water cooling. It is available at all fluoride wavelengths of 157, 193, 248 and 351 nm, and it delivers moderate pulse energies at repetition rates of up to 500 Hz. The company says that the laser features long gas and tube lifetimes, good beam uniformity and high reliability. The beam cross section measures 6 × 3 mm.


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GLOSSARY
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
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