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  • DUV Optical Coating
Jan 2008
Agilent Technologies Inc.Request Info
SAN JOSE, Calif., Jan. 23, 2007 -- Agilent Technologies Inc. said it is entering the growing ultraviolet (UV) optics market by offering deep-UV coating capabilities for optics used in medical and semiconductor photolithography systems. The company made the announcement yesterday at SPIE Photonics West 2008 in San Jose, Calif.

"UV-wavelength lasers and lamps are driving high-volume requirements for optical components," said Vince Barich, operations and marketing manager for Agilent's precision optics group. "Challenges for system designers include coating compaction and optic lifetime. Agilent has developed proprietary high-throughput UV coatings that increase component lifetime while minimizing compaction, thereby extending the time between maintenance cycles and reducing system downtime."

AgilentOptics.jpgReflectivity and damage-threshold testing have been successfully completed, and in independent tests Agilent has qualified multiple coating chambers, which ensures product availability, the company said.

Agilent said its vertically integrated design-to-production facility includes in-house fabrication (shaping, grinding and polishing) and coating (deep-UV to near-IR) capabilities. Comprehensive metrology and use of the latest equipment to monitor and control pressure, temperature and rate ensure accurate and repeatable production processes.

Agilent is showcasing its new UV optics in Booth 1037 at Photonics West.

For more information, visit:; e-mail:

Agilent Technologies Inc.
5301 Stevens Creek Blvd.
Santa Clara, CA 95051
Phone: (877) 424-4536
Fax: (408) 345-8474


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A lithographic technique using an image produced by photography for printing on a print-nonprint, sectioned surface.
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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