Zygo Corp.’s new generation of 3-D optical profilers measure and quantify surface roughness, step heights, critical dimensions and surface topography. The NewView 7000 series is available in two platforms: the 7300 and the 7200. Based on proprietary scanning technology, the profilers have a 20-mm scan range and produce subnanometer Z-resolution at high speeds. Features include an ultrahigh-speed scanner with improved linearity, improved signal-to-noise ratio, increased illumination output, next-generation electronics with encoded stages and a new suite of machine vision tools. The profilers are powered by the proprietary MetroPro metrology software package that provides integrated automated instrument control and advanced 2- and 3-D data analysis and visualization. The software offers easy measurement setup, programmable measurement recipes and scripting, a customizable GUI, pass/fail limits and automatic flagging, stitching, data masking, and data segmentation and histogramming.