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  • TFE Scanning Microscope
Aug 2008
JEOL USA Inc.Request Info
PEABODY, Mass., Aug. 4, 2008 – JEOL USA has released the JSM-7600F thermal field emission scanning electron microscope to minimize beam damage on heat sensitive samples and to offer improved stability on long-term, unattended data acquisition.

Combining high resolution imaging and high speed analysis, the microscope integrates a semi-in-lens objective lens with an in-lens thermal electron gun. The gun, combined with an aperture angle optimizing lens, can achieve a probe current of 200 nA or higher at an accelerating voltage of 15 kV. The microscope has a guaranteed resolution at a high accelerating voltage of 1.0 nm (30 kV; WD 4.5 mm), at a low accelerating voltage of 1.5 nm (1 kV; WD 1.5 mm) and at a high probe current of 3.0 nm (current 5 nA, 15 kV, WD 8 mm). The specimen chamber of the microscope can accommodate samples up to 200 mm in diameter.

JEOL-Thermal-field.jpgThe microscope incorporates a through-the-lens detection system that features a new energy filter designed to vary the mixture rate of secondary electron and backscattered electron images.

It features a new graphical user interface designed to collectively define, save and retrieve photographing and imaging conditions to facilitate data acquisition under optimum conditions. Simultaneous acquisition of four different types of images is also supported by this feature.

For more information, visit:

11 Dearborn Road
Peabody, MA 01966
Phone: (978) 535-5900
Fax: (978) 536-2205


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The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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