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PATTERN INSPECTION

Photonics Spectra
Sep 2008
Nikon Instruments Inc.Request Info
 
The APM-3000 series automated pattern profile inspection device has been unveiled by Nikon Instruments Inc. Comprising an optical system with a polarizer and a high-numerical-aperture objective, it leverages a form of birefringence in a Fourier space to detect critical dimension and pattern edge roughness variations, which are detected as polarization fluctuations and converted by the polarizer into the light intensity.


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