Sep 2008TMCRequest Info
Technical Manufacturing Corp. (TMC) has launched the PEPS II, a digital noncontact precision electronic positioning system for pneumatic vibration isolators. The company says that the system improves isolator height control and settling time, which results in increased yield of semiconductor manufacturing equipment by providing a better approach to payload position control in response to motorized X-Y stage motion. The instrument has a new digital controller and an improved LCD user interface. The optional VX feature incorporates inertial sensors for active damping of vertical isolator resonance.