Nov 2008Veeco Instruments Inc.Request Info
Veeco Instruments Inc. has added the ultraflexible GEN10 for materials research to its family of cluster tool molecular beam epitaxy (MBE) systems. The instrument can epitaxially deposit on single 1-, 2- and 3-in. wafers and incorporates the company’s automated cluster wafer transfer system. The platform allows for easy maintenance, and the automated and upgradable R&D system is capable of processing devices with incompatible materials.