MEMS SCANNING MIRROR
Jan 2009OPUS Microsystems Corp.Request Info
The BA0050 microelectromechanical systems (MEMS) resonant scanning mirror manufactured by Opus Microsystems Corp. is an ultracompact laser scanner housed in a 10 × 10-mm plastic leaded chip carrier package. Its square gold-coated mirror measures 2.5 × 3.0 mm and has a resonant frequency of 500 Hz ±5%. The maximum optical scan angle is 60°, with high frequency stability and low scan jitter. A reference drive circuit is available for easy implementation.