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MEMS SCANNING MIRROR

Photonics Spectra
Jan 2009
OPUS Microsystems Corp.Request Info
 
OpusMicrosystems.jpgThe BA0050 microelectromechanical systems (MEMS) resonant scanning mirror manufactured by Opus Microsystems Corp. is an ultracompact laser scanner housed in a 10 × 10-mm plastic leaded chip carrier package. Its square gold-coated mirror measures 2.5 × 3.0 mm and has a resonant frequency of 500 Hz ±5%. The maximum optical scan angle is 60°, with high frequency stability and low scan jitter. A reference drive circuit is available for easy implementation.


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