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WAFER ANALYZER

Photonics Spectra
Mar 2009
PANalytical Inc.Request Info
 
PANanalytical.jpgPANalytical has launched the 2830 ZT, a wafer analyzer that performs simultaneous noncontact determination of layer thickness and composition on wafers up to 300 mm. The wavelength dispersive x-ray fluorescence instrument also determines contamination, dopant levels and surface uniformity, and it measures up to 24 elements on stacks of up to 16 layers. It operates at a constant current of 160 mA and is supplied with the company’s SuperQ software.


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