NanoFocus AG’s μscan explorer profilometer integrates noncontact optical distance sensors, data acquisition and control systems, and surface analysis software based upon Digital Surf’s technologies. It measures surface texture, roughness and geometry, and the thickness of transparent materials. There are 3-D configurations with an envelope of up to 200 × 150 × 140 mm and 2-D configurations for measuring profiles. The chromatic confocal sensors are insensitive to slope and have a vertical range from 400 to 3200 μm and vertical resolution from 2 to 15 nm. They are equipped with a long-life LED light source and have no moving parts.