The PI nano XY and PI nano XYZ piezo scanning stages launched by PI (Physik Instrumente) LP are optimized for integration into high-resolution microscopes. They feature a 20-mm profile, a large aperture, a piezoresistive integrated sensor and travel ranges of up to 200 × 200 × 200 μm with subnanometer closed-loop resolution. Typical linearity is ±0.1%, maximum payload is 500 g, typical repeatability is <5 nm, and operating temperature is from 20 to 30 °C. Long lifetime is ensured by the integrated ceramic-encapsulated PICMA piezo actuators. Applications include 3-D imaging, laser technology, mask/wafer positioning and interferometry.