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Paladin Advanced UV Lasers

Photonics.com
Jul 2009
Coherent Inc.Request Info
 
Quasi-CW Lasers for Microelectronics Fabrication
SANTA CLARA, Calif., July 14, 2009 – Two new quasi-continuous-wave ultraviolet lasers have been released by Coherent Inc. The Paladin Advanced 355-10000 and Paladin Advanced 355-16000 are mode-locked, frequency-tripled, diode-pumped solid-state lasers that offer 10 and 16 W of power, respectively, at 355 nm and at 80 MHz.

They produce a high quality TEM00 beam with M2 <1.2, good stability and low noise of <1% rms from 10 Hz to 2 MHz. Both models offer improved operating efficiency over their lower power predecessors, resulting in a reduced cost per watt in terms of purchase price and operating expense. Because these new lasers share nearly all of the same mechanical and optical characteristics as the lower power models, there is a straightforward migration path for systems builders looking to take advantage of their increased power and efficiency.

Coherent-Paladin.jpgThe combination of high-power, quasi-continuous-wave UV output and good beam characteristics make the lasers suitable for a variety of applications in microelectronics fabrication, flat panel display manufacturing, solar cell production and bioinstrumentation. They are well suited for laser direct imaging of printed circuit boards, where their higher power delivers increased throughput and improved spatial resolution, and also provides users the option of using less sensitive and lower cost photoresists.

They offer improved throughput for inspection of patterned and nonpatterned semiconductor wafers. High UV power also makes them useful for a number of structuring and patterning tasks in flat panel display and solar cell production. In the printing industry, these same characteristics enable direct computer-to-plate imaging of flexographic printing plates, and in bioinstrumentation applications, the lasers can increase the speed of medical diagnostic instruments like flow cytometers.

For more information, visit: www.coherent.com  

Coherent Inc.
5100 Patrick Henry Drive
Santa Clara, CA 95054
Phone: (408) 764-4000
Fax: (408) 764-4800


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GLOSSARY
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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