Apr 2007PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) LP has unveiled the M-511.HD hybrid nanopositioning translation stage, which can be used in nanometrology, microscopy, laser technology and interferometry. The hybrid system combines the advantages of piezo-flexure drives with the long travel ranges (to 100 mm) and high holding forces of a servomotor/ballscrew arrangement. The stage features 4-nm linear encoder resolution, reliable execution of nanometer-level increments, millisecond settling time to nanometer accuracy, and active compensation of stick/slip during startup and settling. It also offers active backlash compensation, velocity control, a 100-kg load capacity and high holding forces with minimum power consumption.