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  • Libra 200 CS TEM
Aug 2009
Carl Zeiss Jena GmbHRequest Info
Corrected Transmission Electron Microscopes
OBERKOCHEN, Germany, Aug. 28, 2009 – Carl Zeiss SMT AG has developed a line of corrected Libra 200 transmission electron microscopes (TEMs) which are offered in two configurations.

CarlZeiss_Leibra.jpgThe Libra 200 CS TEM is based on the energy-filter version of the 200-kV Libra TEM with a corrector for spherical aberrations of the objective lens. With the corrector, image resolution below 0.7 Å can be achieved. Applications include imaging of interfaces in semiconductors and solar cells, of grain boundaries in steel alloys, and of damage induced by nuclear radiation in shielding materials. In all these applications, control of the material at the atomic scale is necessary for in-depth understanding of the underlying physical or chemical processes and for guaranteeing the functionality of the devices.

Another advantage of the corrector is the ability to reduce the acceleration voltage down to 80 kV and still achieve resolutions below 1 Å. Beam damage can thus be reduced, and sensitive materials like carbon nanotubes can be analyzed.

The Libra 200 STEM (scanning transmission electron microscope) with a corrector for the condenser system is used for imaging in scanning mode with resolution below 1 Å and for high-resolution chemical analysis of samples, especially by means of electron energy loss spectroscopy. The corrected condenser allows minimizing the probe size below 1 Å, and at the same time increases intensity. The monochromator reduces the energy spread down to 0.15 eV. Basic research in materials science, such as chemical analysis of nanoparticles, will benefit from the resulting energy resolution that otherwise can be reached only at synchrotron rings.

For more information, visit:  

Carl Zeiss SMT AG
Rudolf-Eber-Strasse 2
73447 Oberkochen
Phone: +49 7364 20 2194
Fax: +49 7364 20 9206


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The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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