Micromachining Workstation

MKS/Newport

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For Laser Direct-Write Processing

IRVINE, Calif., Oct. 6, 2009 – Newport Corp. has introduced a micromachining workstation designed for high-precision laser direct-writing and patterning. The flexible device can be integrated with several lasers to produce 2- or 3-D patterning and writing on virtually any material.

According to Newport, it is simple to assemble with standard off-the-shelf parts from the company and easy to couple with continuous-wave, nanosecond and femtosecond lasers. It also can be used to produce submicron resolution on large surface areas of the substrates.

It performs real-time imaging of microfabrication through bright-field transmission light microscopy.

It can be customized with different lasers to perform surface and volume patterning in semiconductors, dielectrics and biocompatible materials. The workstation configuration includes high-precision high-end linear stages that are stacked on top of each other to move the sample around a fixed laser beam. The system is designed for surface and bulk micromachining, ablation, two-photon polymerization, and prototyping of complex 2- and 3-D microstructures in fields such as photonics, microelectronics and tissue engineering.

It uses standard optics, optomechanics, motorized motion and up-to-date laser products to provide high performance and accuracy. Its user-friendly interface enables creation of diverse patterns on many substrates, and the intuitive software allows the researcher to easily collect and analyze the data. The company also offers a detailed list of compatible parts that can be used to customize the workstation to meet specific application requirements.

For more information, visit: www.newport.com/ldw

Newport Corp.
1791 Deere Avenue
Irvine, CA 92606
Phone: (949) 863-3144
Fax: (949) 253-1800

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Published: October 2009