Request InfoPlasma Etch Inc.Plasma Etch Inc. has introduced a reactive ion etching (RIE) version of its BT1 plasma system. The BT1-RIE performs fast anisotropic removal of photoresist, nitrides, oxides, polyimides and diamondlike carbon films. It includes a water-cooled RIE electrode for processing multiple substrates up to 1 sq ft per load cycle. The system uses a 1250-W 13.56-MHz radio-frequency power supply with automatic matching for high-rate etching. It is supplied standard with two mass flow controllers for two gases, with up to four gas channels available optionally. Up to 20 process sequences can be stored, and...See full productRelated content from Photonics MediaPRODUCTSPhotonics.com 3/27/2023Electron Beam Metrology SystemApplied Materials’ VeritySEM® 10 CD-SEM metrology system is designed to precisely measure the critical dimensions of semiconductor device features patterned with EUV and emerging High-NA...ARTICLESPhotonics Spectra March 2024 Issue3D Printed Micro-optics Embed into a Durable Hybrid LaserResearchers have shown that 3D-printed polymer-based micro-optics can withstand the heat and power levels that occur inside a laser. The advancement enables inexpensive compact and stable laser...Photonics.com 7/26/2022Partnership Streamlines EUV Dry Resist Tech Chemical Supply ChainA partnership unveiled this month at SEMICON WEST 2022 aims to provide semiconductor manufacturers with reliable access to precursor chemicals for dry photoresist technology for EUV lithography. ...Photonics Spectra May 2023 IssueVirtual Semiconductor Fab Reduces Manufacturing Carbon FootprintThe Belgium-based research and innovation hub imec developed a virtual fab model that enables the hub and its partners to assess current manufacturing choices, identify areas of focus, and project...Photonics Spectra August 2022 IssueLiquid Silica Resin Optimizes 3D Printing for Complex Micro-OpticsA liquid silica resin (LSR) developed by researchers at the University of Arizona has proven successful as a 3D-printing medium for complex micro-optics. The organic-inorganic hybrid material has...WEBINARSPhotonics.com 2/4/2015Enabling Nanophotonics, Data Storage and Energy Conversion with New Plasmonic MaterialsOver the past decade, one of the major focal points for the area of nanophotonics has been developing a new class of plasmonic structures and metamaterials as potential building blocks for advanced...Photonics.com 1/21/2021Raman Spectroscopic Characterization of MicroplasticsPlastic pollution, specifically microplastics and nanoplastics (plastic particulate <5 mm), is a global problem that threatens the environment and potentially human health. Microplastics have been...Photonics.com 1/10/2023UV Fatigue and Laser-Induced Contamination of OpticsLaser-induced contamination is a key concern for ultraviolet (UV) laser systems. Contamination resulting from the environment or outgassing can significantly reduce performance or lead to system...Photonics.com 10/27/2021Fiber Optic Solutions for Medical DevicesSteve Allen provides a brief overview and examples of procedures that continue to push adoption and proliferation of optical fiber-based medical devices. From cosmetic surgery to cutting-edge sensing...PHOTONICS DICTIONARY+ TERMSPhotonics Dictionaryion-beam sputteringIon-beam sputtering (IBS) is a physical vapor deposition (PVD) technique used for depositing thin films onto substrates. It involves bombarding a target material with a beam of energetic ions,...Photonics Dictionarybroadband dielectric mirrorsBroadband dielectric mirrors, also known as broadband mirrors, are optical coatings designed to efficiently reflect or transmit light over a broad range of wavelengths. These mirrors are constructed...Photonics Dictionarythermal interface materialsThermal interface materials (TIMs) are substances or compounds used to enhance the thermal conductivity between two surfaces in contact. These materials are primarily employed in electronic devices,...Photonics Dictionarycarbon arcAn electric discharge between two carbon rods that are touched together to start the arc and then separated slightly. The light comes from the heated carbon vapor. High-intensity arcs use cored...PHOTONICS BUYERS' GUIDE CATEGORIESUltraviolet CoatingsPlasma and Fusion Diagnostic SystemsPhotolithography EquipmentPhotolithography ServicesCOMPANIESPhotonics Buyers' GuideBlackstone-NEY UltrasonicsBlackstone-NEY Ultrasonics is a recognized leader in ultrasonic technology and provider of industrial and precision ultrasonic cleaning equipment. We design and manufacture efficient and...