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Metrology System

Photonics Spectra
Oct 2009
Rudolph Technologies Inc.Request Info
 
RudolphTechnologies.jpgRudolph Technologies Inc. has unveiled the S3000S metrology system for in-line process control of advanced diffusion and fab-wide thin-film applications. The system enables simultaneous measurement with multiwavelength, multiangle focus beam ellipsometry and deep ultraviolet reflectometry, and is built on the Vanguard-II automation platform. A MAControl module, which provides one-step nondestructive removal of the molecular airborne contamination layer on thin films, is available as an option.


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GLOSSARY
thin film
A thin layer of a substance deposited on an insulating base in a vacuum by a microelectronic process. Thin films are most commonly used for antireflection, achromatic beamsplitters, color filters, narrow passband filters, semitransparent mirrors, heat control filters, high reflectivity mirrors, polarizers and reflection filters.
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