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STACIS SEM-Base

Photonics.com
Nov 2009
TMCRequest Info
 
Vibration Cancellation System
PEABODY, Mass., Nov. 9, 2009 – Technical Manufacturing Corp. has expanded its STACIS active piezoelectric vibration cancellation product line with the introduction of the STACIS SEM-Base floor platform for scanning electron microscopes (SEMs).

TechnicalManufacturingCorp.jpgSEM-Base is a compact, cost-effective system that has a much smaller footprint than the 2100 model. It installs easily with minimal tuning and offers subhertz vibration cancellation in an active hard-mount floor platform that fits most commercial scanning electron microscopes. It is compatible with all internal SEM vibration isolation systems. 

The system is designed for integration into advanced high-throughput lithography and metrology tools. The technology is capable of fast settling of the isolated payload in response to motorized stage-induced motion, resulting in increased tool throughput. The platform provides vibration isolation comparable to that delivered by the company’s 2100 model but is specifically designed to be the primary isolation system incorporated inside the tool.

Vibration cancellation starts below 1 Hz. The system features extended-stroke piezoelectric actuators and damped powder-coated steel plates that sandwich four isolators and the proprietary DC 2000 digital controller. It is 0.14 m tall, measures 0.90 × 1.13 m and weighs <181 kg. It can support 900 to 2500 lb with no soft air suspension and is available with three or six degrees of freedom.

For more information, visit: www.techmfg.com  

Technical Manufacturing Corp.
15 Centennial Drive
Peabody, MA 01960
Phone: (978) 532-6330
Toll Free: (800) 542-9725
Fax: (978) 531-8682


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photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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