g2T Beam Profiling, Scanning System
Jan 2010LIMO Lissotschenko Mikrooptik GmbHRequest Info
DORTMUND, Germany, Jan. 4, 2010 – LIMO Lissotschenko Mikrooptik GmbH has introduced the g2T beam profiler and scanning system, a two-in-one system that combines two optical concepts: the transformation of Gaussian beams into homogeneous top-hat profiles and a scan method involving galvo mirrors and a specifically designed f-Theta objective lens.
It was constructed for laser direct materials structuring with single-mode lasers, especially at 532 nm and in particular for solar cell manufacturing. The Fraunhofer Institute for Solar Energy Systems has applied this technology and has demonstrated ablation of thin films on the basis of a 75-nm SiN layer on Si and achieved a precise result without causing any damage to deeper layers.
In comparison to Gaussian beams, the throughput can be increased by the use of g2T profiles because of smaller pulse-to-pulse spatial overlaps.
Standard spot sizes of 50 × 50 µm2 can structure high-precision grooves with smooth edges in contrast to the typical sawtooth-patterns caused by Gaussian beams. The process window is enhanced and thermal damages are reduced by the homogeneous profile. With a scan field size of 155 × 155 mm², standard solar cells can be structured cost-effectively in one production run and with high throughput.
For more information, visit: www.limo.de
LIMO Lissotschenko Mikrooptik GmbH
Phone: +49 231 2224 10
Fax: +49 231 2224 1140