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Excimer Laser

Photonics Spectra
Jan 2010
Coherent Inc.Request Info
 
LEAP, a high-duty-cycle excimer laser manufactured by Coherent Inc., is suitable for use in microelectronics and medical device manufacturing applications. It is intended for cost-sensitive, throughput-critical micromanufacturing tasks, such as for small functional devices with smart functions and microfluidic parts. The Novatube construction and discharge design provides low operation costs per watt. The direct UV laser emission delivers a per-pulse energy of 650 mJ at repetition rates of up to 200 Hz, for an average power of 130 W. The laser operates at 248 or 308 nm. Stabilized energy range is from 550 to 650 mJ, and typical pulse duration is 22 ±5 ns FWHM.


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GLOSSARY
excimer
A contraction of "excited dimer." The term refers to an excited species made by combination of two identical atoms or molecules, one of which is excited and one of which is at a ground state.
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