Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn

  • IndyStar Excimer Laser
Apr 2010
Coherent Inc.Request Info
SANTA CLARA, Calif., April 7, 2010 — Coherent Inc. has added a new model to its IndyStar family of compact excimer lasers that offers a 2-kHz repetition rate for increased throughput.

The fully Semi S2-certified laser incorporates several new output stabilization features for improved processing, making it suitable for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. It is offered with a choice of 193-nm (ArF) output where it delivers 8 W of stabilized power, or 248-nm (KrF) output with 12 W of stabilized power.

The device uses an advanced electronics platform enabling two new stabilization features called PowerLok and TimeLok. The former ensures constant pulse energy of each laser pulse, actively stabilized particularly for applications using bursts of pulses or specific pulse trains. The latter provides good trigger-to-pulse delay stability, supporting tight synchronization with other equipment.

The laser offers low cost of ownership because of its use of field-proven all-metal-ceramic tube technology that delivers high reliability and long lifetime. With 193-nm operation, the laser shows a tube/optics lifetime exceeding 10 billion pulses, which translates into hands-free operation for more than one year.

Suitable for use in semiconductor applications such as photomask inspection and testing photolithography optics, it also enables other high-speed processes including precision material ablation tasks and high-value marking applications.

For more information, visit: 


* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address 2:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2016 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.