Self-Heating Sensor Chips
May 2010State of The Art Inc.Request Info
For thermal resistance measuring applications, State of the Art
(SOTA) Inc. is offering a line of microwave self-heating sensor chips that use platinum
on alumina and oxidized silicon. The heater/sensors are suitable for use in applications
from microelectronics to biomedical engineering, including determination of thermal
resistance of integrated circuit chips, variable optical attenuation of arrayed
waveguide gratings, and thermal management in miniature chambers (minicell arrays).
The TM365 model has two thermal sensors near the heater for stringent temperature
control, and the TM364 single-sensor design provides moderate temperature control.
Both operate at up to 250 °C. Self-heating is below 4 mW/°C. Custom designs
can be developed based on customer drawings.