Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
SPECIAL ANNOUNCEMENT
2016 Photonics Buyers' Guide Clearance! – Use Coupon Code FC16 to save 60%!
share
Email Facebook Twitter Google+ LinkedIn

Immersion BARC

Photonics Spectra
Jul 2010
Brewer Science Inc.Request Info
 
Brewer Science has launched the ARC29L coating, a state-of-the-art argon-fluoride immersion bottom antireflection coating (BARC) that provides broad photoresist compatibility and tuned optical properties for use as a top layer in a dual-layer BARC stack or as a single layer BARC on SiON. The coating is based on the proprietary ARC29SR coating platform and provides low substrate reflectivities of less than 0.1% for film thicknesses of less than 40 nm. It is suitable for extending leading-edge immersion processes in both single- and double-patterning lithography schemes. Its low thermal conductivity value delivers improved reflectivity control on absorbing substrates such as TiN and SiN.


REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required
GLOSSARY
optical
Pertaining to optics and the phenomena of light.
photoresist
A chemical substance rendered insoluble by exposure to light. By means of a photoresist, a selected pattern can be imaged on a metal. The unexposed areas are washed away and are ready for etching by acid or doping to make a microcircuit.
reflectivity
The ratio of the intensity of the total radiation reflected from a surface to the total incident on that surface.
Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2016 Photonics Media
x Subscribe to Photonics Spectra magazine - FREE!