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Perkins Precision Developments - Plate Polarizers LB 4/24

Immersion BARC

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Brewer Science Inc.
Brewer Science has launched the ARC29L coating, a state-of-the-art argon-fluoride immersion bottom antireflection coating (BARC) that provides broad photoresist compatibility and tuned optical properties for use as a top layer in a dual-layer BARC stack or as a single layer BARC on SiON. The coating is based on the proprietary ARC29SR coating platform and provides low substrate reflectivities of less than 0.1% for film thicknesses of less than 40 nm. It is suitable for extending leading-edge immersion processes in both single- and double-patterning lithography schemes. Its low thermal...See full product

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