Jul 2010Coherent Inc.Request Info
Coherent Inc. has added a new model to its Indy-Star family of
compact excimer lasers that offers a 2-kHz repetition rate for increased throughput.
The fully Semi S2-certified laser incorporates several new output stabilization
features for improved processing, making it suitable for use in semiconductor fabrication,
testing, inspection and micromaterials processing facilities. It is offered with
a choice of 193-nm (ArF) output, where it delivers 8 W of stabilized power, or with
248-nm (KrF) output with 12 W of stabilized power. Suitable for use in semiconductor
applications such as photomask inspection and testing photolithography optics, it
enables other high-speed processes also, including precision material ablation tasks
and high-value marking applications.