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Excimer Laser

Photonics Spectra
Jul 2010
Coherent Inc.Request Info
 
Coherent Inc. has added a new model to its Indy-Star family of compact excimer lasers that offers a 2-kHz repetition rate for increased throughput. The fully Semi S2-certified laser incorporates several new output stabilization features for improved processing, making it suitable for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. It is offered with a choice of 193-nm (ArF) output, where it delivers 8 W of stabilized power, or with 248-nm (KrF) output with 12 W of stabilized power. Suitable for use in semiconductor applications such as photomask inspection and testing photolithography optics, it enables other high-speed processes also, including precision material ablation tasks and high-value marking applications.


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GLOSSARY
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
photolithography
A lithographic technique using an image produced by photography for printing on a print-nonprint, sectioned surface.
power
With respect to a lens, the reciprocal of its focal length. The term power, as applied to a telescope or microscope, often is used as an abbreviation for magnifying power.
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