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Piezo Stage

EuroPhotonics
Aug 2010
PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
 
The P-563.3CD PIMars stage from PI (Physik Instrumente) L.P. is a piezo scanning and nanomanipulation system. Enabling precision motion control with subnanometer resolution and 340 x 340 x 340-μm travel in the X-Y-Z axes, it is suitable for micromanufacturing, biotechnology, nanotechnology, scanning microscopy, and semiconductor and data-storage test equipment applications. The instrument incorporates high-force solid-state piezo actuator drives, frictionless flexure guiding systems, absolute measuring capacitive position sensors and a 66 x 66-mm clear aperture. Ultrahigh-vacuum versions up to 10–9 hPa are available as well as Invar, Super-Invar and titanium models.


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GLOSSARY
invar
A material often used in the construction of optical instruments because of its low coefficient of thermal expansion (0.9 x 10-6/ °C).
nanotechnology
The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
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