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Large-Area UV Machining Solutions

Photonics Showcase
Sep 2010
Coherent Inc.Request Info
 
VarioLas mask imaging or line beam systems are based on the well-known COMPexPro excimer laser series. These lasers are affordable tools for high-quality large-area UV laser machining and surface annealing. Superior optics and ruggedized mechanics are key to the VarioLas platform, which is available at 193-, 248- and 308-nm laser wavelengths.


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GLOSSARY
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
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