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Confocal Height Sensor

Photonics.com
Oct 2010
Newport CorporationRequest Info
 
IRVINE, Calif., Oct. 12, 2010 — Newport Corp. has announced that a confocal height sensor is now available for use with its MRSI dispense systems. The chromatic confocal sensor allows measurements in a single axis, providing access to deep cavities, confined spaces and areas that are close to walls and other obstructions.

This measuring tool is suitable for radio-frequency and microwave packages, which have been difficult to measure using traditional, reflective-laser height-sensing techniques.

An LED light source with a sensor spot size of 50 µm in diameter provides nanoresolution that is nearly target independent. The confocal sensor allows accurate measurement of glass, semiconductor materials and mirrored surfaces. It can be used to precisely determine dispense heights for three of the company’s legacy products, the MRSI-175Ag, the MRSI-605 and the MRSI M-5.

The MRSI dispense systems provide advanced assembly solutions for complete epoxy die attach, eutectic, and flip-chip bonding and packaging, delivering turnkey production for microelectromechanical systems, multichip modules, semiconductor packaging, microwave modules and photonics packaging.


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GLOSSARY
chromatic
Having the property of color.
eutectic
The material that has the lowest possible constant melting point of any possible combination of the same components.
glass
A noncrystalline, inorganic mixture of various metallic oxides fused by heating with glassifiers such as silica, or boric or phosphoric oxides. Common window or bottle glass is a mixture of soda, lime and sand, melted and cast, rolled or blown to shape. Most glasses are transparent in the visible spectrum and up to about 2.5 µm in the infrared, but some are opaque such as natural obsidian; these are, nevertheless, useful as mirror blanks. Traces of some elements such as cobalt, copper and...
microwave
An electromagnetic wave lying within the region of the frequency spectrum that is between about 1000 MHz (1 GHz) and 100,000 MHz (100 GHz). This is equivalent to the wavelength spectrum that is between one millimeter and one meter, and is also referred to as the infrared and short wave spectrum.
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