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  • AcuityXR Technology
Dec 2010

BOSTON, Dec. 2, 2010 — Bruker Corp. has announced the AcuityXR optical surface profiler technology that combines proprietary and patent-pending hardware and software to enable select ContourGT noncontact 3-D optical surface profilers to break the optical diffraction limit and deliver high lateral resolutions.

Many nanoscale applications in the semiconductor, medical and precision machining fields today have surface features and defects with dimensions that limit detection or identification due to the optical diffraction limit. Such miniscule features and defects can affect function, performance, quality and/or manufacturing yields and are of interest to researchers and production quality assurance/quality control personnel.

The company’s optical surface profiler systems equipped with AcuityXR have shown resolution of features below 130 nm in width, which the company says is nearly three times finer than that of systems without this technology. AcuityXR enables this new level of precision while preserving the wide field of view and high performance benefits of noncontact 3-D optical surface profiling.

With the new technology, dimensional repeatability on narrow structures has been shown to improve by more than a factor of five. This optional capability is now available on the company’s ContourGT-K1, X3 and X8 optical surface profilers.

Applications include semiconductor, medical and precision machining.

The ContourGT family of noncontact 3-D optical surface profilers features patented high-brightness dual-LED illumination that, when combined with the system's high vertical resolution, improves sensitivity and stability and enables precision noncontact 3-D surface metrology in difficult applications and environments that are challenging. The ContourGT also features the proprietary and patent-pending Vision64 operating and analysis software and an intuitive, modular interface that provides user-level customization capabilities for a wide range of surface profiling metrology applications.

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