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Subnanometer Measurement

Photonics Spectra
Jan 2011
Kaman Precision Products, Measuring SystemsRequest Info
 
Kaman Precision Products | Measuring presents the DIT-5200 differential impedance transducer, which makes precision measurements to subnanometer resolution. The noncontact system also offers high thermal stability, high sensitivity and high linearity. It is thermally stable at ±0.03% FS/°C and, at null, ±0.005% FS/°C. It is highly sensitive up to 394 mV/μm, and is extremely linear to 0.1% full range. The company offers this system in single- and dual-channel configurations. The small package size of 7.7 cubic in. leads to easy integration. Applications include precise alignment of fast steering mirrors, servo control position feedback, semiconductor stage positioning, angular displacement indication, X-Y orbit position feedback and stylus position.


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GLOSSARY
linearity
A relationship between two variables so that when plotted on a graph they yield a straight line.
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