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OPTICAL SPECTROGRAPH

Photonics Spectra
Sep 1999
Verity Instruments Inc.Request Info
 
dSPECTROVerity Instruments Inc. has introduced its SD1024 spectrograph for low-exposed-area endpoint detection, plasma diagnostics and advanced process control applications. It provides continuous monitoring of plasma emissions in the 200- to 800-nm range. A 2-D CCD array enables simultaneous monitoring of from one to six fiber optic inputs. The compact optical design provides 1.7-nm resolution with sharp imaging over the entire sensitive area of the detector without using folding mirrors.


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