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SEM Sample Cleaning System

Photonics Spectra
Feb 2011
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Hitachi High-Technologies Corp. has unveiled the ZONESem desktop scanning electron microscope (SEM) sample cleaning system, designed for cleaning and storing electron microscopy samples in readiness for high-quality imaging and analysis. It uses a nondestructive UV cleaning process to quickly remove surface hydrocarbons from scanning electron microscope samples. The system renders high-resolution and/or surface imaging using secondary electrons, backscattered electrons or scanning transmission methods much easier by removing surface hydrocarbon layers that could cause focusing and astigmatism difficulties that would obscure surface and edge detail. Samples prepared in this way also offer better results for energy- and wavelength-dispersive x-ray analysis and for electron backscatter diffraction (EBSD), where surface contamination can suppress EBSD pattern formation.


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