PI (Physik Instrumente) L.P. has introduced the PIFOC piezo objective scanner system packages for microscopy applications. Offering subnanometer resolution, the devices are designed to improve results in fast focusing, lens positioning and deconvolution/3-D imaging. The units consist of software, closed-loop piezomechanic objective positioners and custom-tuned compact digital servocontroller/ driver units. Travel ranges offered are 100, 250 or 400 μm. Available position feedback sensors include the low-cost piezoresistive and the higher-precision capacitive types. Applications include fast autofocus systems, microscopy, 3-D imaging, screening, surface analysis and wafer inspection.